Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495468 | Etching method and etching apparatus | Takahiro Yokoyama, Yoshihide Kihara, Masanobu Honda | 2022-11-08 |
| 11482425 | Etching method and etching apparatus | Ryutaro SUDA | 2022-10-25 |
| 11456180 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2022-09-27 |
| 11450537 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Yoshihide Kihara | 2022-09-20 |
| 11417535 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Yoshihide Kihara, Satoshi OHUCHIDA | 2022-08-16 |
| 11380555 | Etching method and etching apparatus | Sho Kumakura, Hironari Sasagawa, Yoshihide Kihara | 2022-07-05 |
| 11361976 | Substrate processing method and plasma processing apparatus | Ryutaro SUDA | 2022-06-14 |
| 11355352 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2022-06-07 |
| 11355350 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Kenta ONO, Masanobu Honda | 2022-06-07 |
| 11342194 | Substrate processing method and substrate processing apparatus | Ryutaro SUDA | 2022-05-24 |
| 11270889 | Etching method and etching apparatus | Yoshihide Kihara, Masanobu Honda | 2022-03-08 |