Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450537 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Yoshihide Kihara | 2022-09-20 |
| 11380555 | Etching method and etching apparatus | Maju TOMURA, Sho Kumakura, Yoshihide Kihara | 2022-07-05 |