Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482425 | Etching method and etching apparatus | Maju TOMURA | 2022-10-25 |
| 11456180 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2022-09-27 |
| 11361976 | Substrate processing method and plasma processing apparatus | Maju TOMURA | 2022-06-14 |
| 11342194 | Substrate processing method and substrate processing apparatus | Maju TOMURA | 2022-05-24 |