Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11355350 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Maju TOMURA, Masanobu Honda | 2022-06-07 |
| 11328933 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Masanobu Honda | 2022-05-10 |