Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501975 | Substrate processing method and substrate processing apparatus | Daisuke Nishide | 2022-11-15 |
| 11476123 | Etching method, plasma processing apparatus, and substrate processing system | Masanobu Honda, Yuta NAKANE, Shinya Ishikawa | 2022-10-18 |
| 11443954 | Method and apparatus for controlling a shape of a pattern over a substrate | — | 2022-09-13 |
| 11417527 | Method and device for controlling a thickness of a protective film on a substrate | — | 2022-08-16 |
| 11264236 | Substrate processing method | Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda | 2022-03-01 |