Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476123 | Etching method, plasma processing apparatus, and substrate processing system | Takayuki Katsunuma, Masanobu Honda, Shinya Ishikawa | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476123 | Etching method, plasma processing apparatus, and substrate processing system | Takayuki Katsunuma, Masanobu Honda, Shinya Ishikawa | 2022-10-18 |