Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495490 | Semiconductor device manufacturing method | Koichi Yatsuda, Yannick Feurprier, Frederic Lazzarino, Jean-Francois de Marneffe, Khashayar Babaei Gavan | 2022-11-08 |
| 11456184 | Substrate processing method and substrate processing system | Ryuichi Asako | 2022-09-27 |
| 11424143 | Heat insulation structure at lower end of vertical heat treatment apparatus and vertical heat treatment apparatus including heat insulation structure thereof | Koji Yoshii, Hiroyuki Hayashi, Mitsuhiro Okada, Satoshi Takagi, Toshihiko Takahashi +2 more | 2022-08-23 |
| 11387139 | Method of manufacturing semiconductor device | Syuji NOZAWA, Sunghil Lee | 2022-07-12 |
| 11373874 | Etching method and apparatus | Nobuhiro Takahashi, Ayano HAGIWARA, Yasuo ASADA | 2022-06-28 |
| 11367633 | Heat treatment apparatus and heat treatment method | — | 2022-06-21 |
| 11342223 | Semiconductor device manufacturing method and substrate processing apparatus | Syuji NOZAWA, Nagisa Sato | 2022-05-24 |
| 11282699 | Substrate processing apparatus | Syuji NOZAWA | 2022-03-22 |
| 11275445 | Input device | Tetsuya TOMARU | 2022-03-15 |
| 11257697 | Temperature monitoring apparatus, heat treatment apparatus, and temperature monitoring method | Yasuaki Kikuchi | 2022-02-22 |
| 11258023 | Resistive change elements using passivating interface gaps and methods for making same | Mark T. Ramsbey, Thomas Rueckes, Syuji NOZAWA, Nagisa Sato | 2022-02-22 |