Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424143 | Heat insulation structure at lower end of vertical heat treatment apparatus and vertical heat treatment apparatus including heat insulation structure thereof | Tatsuya Yamaguchi, Hiroyuki Hayashi, Mitsuhiro Okada, Satoshi Takagi, Toshihiko Takahashi +2 more | 2022-08-23 |
| 11390948 | Film forming apparatus | Masato Yonezawa, Shigehiro Miura, Hiroyuki Akama | 2022-07-19 |