Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11390948 | Film forming apparatus | Shigehiro Miura, Hiroyuki Akama, Koji Yoshii | 2022-07-19 |
| 11328901 | Deposition method | Shigehiro Miura, Takehiro FUKADA, Yoshitaka Enoki, Yuji Sawada | 2022-05-10 |