Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479852 | Method for dry cleaning a susceptor and substrate processing apparatus | Jun Sato, Takashi Chiba | 2022-10-25 |
| 11390948 | Film forming apparatus | Masato Yonezawa, Hiroyuki Akama, Koji Yoshii | 2022-07-19 |
| 11328901 | Deposition method | Masato Yonezawa, Takehiro FUKADA, Yoshitaka Enoki, Yuji Sawada | 2022-05-10 |
| 11274372 | Film deposition apparatus | — | 2022-03-15 |