Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479852 | Method for dry cleaning a susceptor and substrate processing apparatus | Jun Sato, Shigehiro Miura | 2022-10-25 |
| 11393673 | Deposition method | Jun Sato | 2022-07-19 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479852 | Method for dry cleaning a susceptor and substrate processing apparatus | Jun Sato, Shigehiro Miura | 2022-10-25 |
| 11393673 | Deposition method | Jun Sato | 2022-07-19 |