Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424143 | Heat insulation structure at lower end of vertical heat treatment apparatus and vertical heat treatment apparatus including heat insulation structure thereof | Koji Yoshii, Tatsuya Yamaguchi, Hiroyuki Hayashi, Mitsuhiro Okada, Toshihiko Takahashi +2 more | 2022-08-23 |
| 11373876 | Film forming method and film forming apparatus | — | 2022-06-28 |
| 11251034 | Film forming method and substrate processing apparatus | Hiroyuki Hayashi, Rui KANEMURA, Mitsuhiro Okada | 2022-02-15 |