Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373874 | Etching method and apparatus | Nobuhiro Takahashi, Ayano HAGIWARA, Tatsuya Yamaguchi | 2022-06-28 |
| 11342192 | Substrate processing method and storage medium | Nobuhiro Takahashi, Junichiro MATSUNAGA | 2022-05-24 |