Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424128 | Apparatus and method for etching substrate | Yuji Asakawa | 2022-08-23 |
| 11373874 | Etching method and apparatus | Ayano HAGIWARA, Yasuo ASADA, Tatsuya Yamaguchi | 2022-06-28 |
| 11342192 | Substrate processing method and storage medium | Yasuo ASADA, Junichiro MATSUNAGA | 2022-05-24 |