Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387139 | Method of manufacturing semiconductor device | Tatsuya Yamaguchi, Sunghil Lee | 2022-07-12 |
| 11342223 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuya Yamaguchi, Nagisa Sato | 2022-05-24 |
| 11282699 | Substrate processing apparatus | Tatsuya Yamaguchi | 2022-03-22 |
| 11258023 | Resistive change elements using passivating interface gaps and methods for making same | Mark T. Ramsbey, Thomas Rueckes, Tatsuya Yamaguchi, Nagisa Sato | 2022-02-22 |