Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532566 | Misregistration target having device-scaled features useful in measuring misregistration of semiconductor devices | Liran Yerushalmi, Raviv Yohanan, Mark Ghinovker | 2022-12-20 |
| 11467503 | Field-to-field corrections using overlay targets | Enna Leshinsky-Altshuller, Inna Tarshish-Shapir, Mark Ghinovker, Diana Shaphirov, Guy Ben Dov +1 more | 2022-10-11 |
| 11454894 | Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof | Alon Yagil, Yuval Lamhot, Ohad Bachar, Martin Mayo, Tal Yaziv | 2022-09-27 |
| 11360398 | System and method for tilt calculation based on overlay metrology measurements | Paul MacDonald, Ady Levy, Jincheng Pei, Jinyan Song, Amnon Manassen | 2022-06-14 |
| 11355375 | Device-like overlay metrology targets displaying Moiré effects | Liran Yerushalmi, Raviv Yohanan, Mark Ghinovker | 2022-06-07 |
| 11353321 | Metrology system and method for measuring diagonal diffraction-based overlay targets | Ohad Bachar, Nadav Gutman | 2022-06-07 |
| 11353493 | Data-driven misregistration parameter configuration and measurement system and method | Shlomit Katz, Anna Golotsvan, Raviv Yohanan | 2022-06-07 |
| 11353799 | System and method for error reduction for metrology measurements | Liran Yerushalmi, Anna Golotsvan, Rawi Dirawi, Chen Dror, Nir BenDavid +3 more | 2022-06-07 |
| 11302544 | Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein | Renan Milo, Liran Yerushalmi, Moran Zaberchik, Yoel Feler, David Izraeli | 2022-04-12 |
| 11226566 | Method of measuring misregistration of semiconductor devices | Ido Dolev | 2022-01-18 |