Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532566 | Misregistration target having device-scaled features useful in measuring misregistration of semiconductor devices | Roie Volkovich, Raviv Yohanan, Mark Ghinovker | 2022-12-20 |
| 11353799 | System and method for error reduction for metrology measurements | Roie Volkovich, Anna Golotsvan, Rawi Dirawi, Chen Dror, Nir BenDavid +3 more | 2022-06-07 |
| 11355375 | Device-like overlay metrology targets displaying Moiré effects | Roie Volkovich, Raviv Yohanan, Mark Ghinovker | 2022-06-07 |
| 11302544 | Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein | Roie Volkovich, Renan Milo, Moran Zaberchik, Yoel Feler, David Izraeli | 2022-04-12 |