Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532566 | Misregistration target having device-scaled features useful in measuring misregistration of semiconductor devices | Roie Volkovich, Liran Yerushalmi, Mark Ghinovker | 2022-12-20 |
| 11353493 | Data-driven misregistration parameter configuration and measurement system and method | Shlomit Katz, Roie Volkovich, Anna Golotsvan | 2022-06-07 |
| 11355375 | Device-like overlay metrology targets displaying Moiré effects | Roie Volkovich, Liran Yerushalmi, Mark Ghinovker | 2022-06-07 |