Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454894 | Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof | Alon Yagil, Yuval Lamhot, Martin Mayo, Tal Yaziv, Roie Volkovich | 2022-09-27 |
| 11353321 | Metrology system and method for measuring diagonal diffraction-based overlay targets | Roie Volkovich, Nadav Gutman | 2022-06-07 |