Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Itay Gdor, Yuval Lubashevsky, Yuri Paskover, Yoram Uziel | 2022-08-09 |
| 11353321 | Metrology system and method for measuring diagonal diffraction-based overlay targets | Roie Volkovich, Ohad Bachar | 2022-06-07 |