Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Yuval Lubashevsky, Yuri Paskover, Yoram Uziel, Nadav Gutman | 2022-08-09 |
| 11378394 | On-the-fly scatterometry overlay metrology target | Yuri Paskover, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman, Yoram Uziel | 2022-07-05 |