Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Itay Gdor, Yuval Lubashevsky, Yuri Paskover, Nadav Gutman | 2022-08-09 |
| 11378394 | On-the-fly scatterometry overlay metrology target | Yuri Paskover, Itay Gdor, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman | 2022-07-05 |
| 11294164 | Integrated system and method | Igor Krivts (Krayvitz), Albert Mariasin, Nir Merry, Rami Elichai, Zvi Goren | 2022-04-05 |