Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Itay Gdor, Yuval Lubashevsky, Yoram Uziel, Nadav Gutman | 2022-08-09 |
| 11378394 | On-the-fly scatterometry overlay metrology target | Itay Gdor, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman, Yoram Uziel | 2022-07-05 |
| 11314173 | Topographic phase control for overlay measurement | Vladimir Levinski, Amnon Manassen, Yoni Shalibo | 2022-04-26 |
| 11281111 | Off-axis illumination overlay measurement using two-diffracted orders imaging | Yoni Shalibo, Vladimir Levinski, Amnon Manassen, Shlomo Eisenbach, Gilad Laredo +1 more | 2022-03-22 |