Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314173 | Topographic phase control for overlay measurement | Vladimir Levinski, Yuri Paskover, Amnon Manassen | 2022-04-26 |
| 11281111 | Off-axis illumination overlay measurement using two-diffracted orders imaging | Yuri Paskover, Vladimir Levinski, Amnon Manassen, Shlomo Eisenbach, Gilad Laredo +1 more | 2022-03-22 |