Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512948 | Imaging system for buried metrology targets | Andrew V. Hill, Amnon Manassen, Avner Safrani | 2022-11-29 |
| 11346657 | Measurement modes for overlay | Amnon Manassen, Andrew V. Hill | 2022-05-31 |
| 11333616 | Adaptive focusing system for a scanning metrology tool | — | 2022-05-17 |
| 11281111 | Off-axis illumination overlay measurement using two-diffracted orders imaging | Yoni Shalibo, Yuri Paskover, Vladimir Levinski, Amnon Manassen, Shlomo Eisenbach +1 more | 2022-03-22 |
| 11281112 | Method of measuring misregistration in the manufacture of topographic semiconductor device wafers | Daria Negri, Amnon Manassen | 2022-03-22 |