Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531275 | Parallel scatterometry overlay metrology | Amnon Manassen, Dmitry Gorelik | 2022-12-20 |
| 11526086 | Multi-field scanning overlay metrology | Amnon Manassen | 2022-12-13 |
| 11512948 | Imaging system for buried metrology targets | Gilad Laredo, Amnon Manassen, Avner Safrani | 2022-11-29 |
| 11428642 | Scanning scatterometry overlay measurement | Amnon Manassen | 2022-08-30 |
| 11359916 | Darkfield imaging of grating target structures for overlay measurement | Amnon Manassen | 2022-06-14 |
| 11346657 | Measurement modes for overlay | Amnon Manassen, Gilad Laredo | 2022-05-31 |
| 11313669 | Systems and methods for optimizing focus for imaging-based overlay metrology | Amnon Manassen | 2022-04-26 |
| 11300405 | Grey-mode scanning scatterometry overlay metrology | Amnon Manassen | 2022-04-12 |
| 11300524 | Pupil-plane beam scanning for metrology | Amnon Manassen, Avi Abramov, Asaf Granot, Andrei V. Shchegrov | 2022-04-12 |