Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11536674 | Systems and methods for combined reflectometry and photoelectron spectroscopy | Alexander Kuznetsov, Oleg Khodykin | 2022-12-27 |
| 11519719 | Transmission small-angle X-ray scattering metrology system | Antonio Arion Gellineau, Sergey Zalubovsky | 2022-12-06 |
| 11428650 | Computationally efficient x-ray based overlay measurement | John J. Hench, Michael S. Bakeman | 2022-08-30 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2022-07-05 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Oleg Khodykin, Alexander Kuznetsov, Nikolay Artemiev, Michael Friedmann | 2022-05-17 |
| 11300524 | Pupil-plane beam scanning for metrology | Andrew V. Hill, Amnon Manassen, Avi Abramov, Asaf Granot | 2022-04-12 |