Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519719 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Antonio Arion Gellineau | 2022-12-06 |
| 11313816 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman | 2022-04-26 |