Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11519719 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Sergey Zalubovsky | 2022-12-06 |
| 11519869 | Methods and systems for real time measurement control | — | 2022-12-06 |
| 11313816 | Full beam metrology for x-ray scatterometry systems | Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman, Sergey Zalubovsky | 2022-04-26 |