Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11313816 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, John J. Hench, Sergey Zalubovsky | 2022-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11313816 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, John J. Hench, Sergey Zalubovsky | 2022-04-26 |