Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11536674 | Systems and methods for combined reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Oleg Khodykin | 2022-12-27 |
| 11460418 | Methods and systems for semiconductor metrology based on wavelength resolved soft X-ray reflectometry | Chao Chang | 2022-10-04 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Manh Dang Nguyen, Stilian Ivanov Pandev +8 more | 2022-07-05 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Oleg Khodykin, Andrei V. Shchegrov, Nikolay Artemiev, Michael Friedmann | 2022-05-17 |