Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11460418 | Methods and systems for semiconductor metrology based on wavelength resolved soft X-ray reflectometry | Alexander Kuznetsov | 2022-10-04 |
| 11272607 | Laser produced plasma illuminator with low atomic number cryogenic target | Michael Friedmann, Jongjin Kim, Will Schumaker, Ben Clarke | 2022-03-08 |
| 11259394 | Laser produced plasma illuminator with liquid sheet jet target | Will Schumaker, Jongjin Kim, Michael Friedmann | 2022-02-22 |