Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530913 | Methods and systems for determining quality of semiconductor measurements | Dzmitry Sanko, Min-Yeong Moon | 2022-12-20 |
| 11520321 | Measurement recipe optimization based on probabilistic domain knowledge and physical realization | Wei Lu, Dzmitry Sanko | 2022-12-06 |
| 11415898 | Signal-domain adaptation for metrology | — | 2022-08-16 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2022-07-05 |
| 11313809 | Process control metrology | Wei Lu | 2022-04-26 |