Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Oleg Khodykin, Andrei V. Shchegrov, Alexander Kuznetsov, Michael Friedmann | 2022-05-17 |