Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11536674 | Systems and methods for combined reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Alexander Kuznetsov | 2022-12-27 |
| 11419202 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese | 2022-08-16 |
| 11343899 | Droplet generation for a laser produced plasma light source | Brian Ahr, Alexander N. Bykanov, Rudy F. Garcia, Layton Hale | 2022-05-24 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Andrei V. Shchegrov, Alexander Kuznetsov, Nikolay Artemiev, Michael Friedmann | 2022-05-17 |
| 11317500 | Bright and clean x-ray source for x-ray based metrology | — | 2022-04-26 |