Issued Patents 2022
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531275 | Parallel scatterometry overlay metrology | Andrew V. Hill, Dmitry Gorelik | 2022-12-20 |
| 11526086 | Multi-field scanning overlay metrology | Andrew V. Hill | 2022-12-13 |
| 11512948 | Imaging system for buried metrology targets | Andrew V. Hill, Gilad Laredo, Avner Safrani | 2022-11-29 |
| 11428642 | Scanning scatterometry overlay measurement | Andrew V. Hill | 2022-08-30 |
| 11359916 | Darkfield imaging of grating target structures for overlay measurement | Andrew V. Hill | 2022-06-14 |
| 11360398 | System and method for tilt calculation based on overlay metrology measurements | Roie Volkovich, Paul MacDonald, Ady Levy, Jincheng Pei, Jinyan Song | 2022-06-14 |
| 11353799 | System and method for error reduction for metrology measurements | Roie Volkovich, Liran Yerushalmi, Anna Golotsvan, Rawi Dirawi, Chen Dror +3 more | 2022-06-07 |
| 11346657 | Measurement modes for overlay | Andrew V. Hill, Gilad Laredo | 2022-05-31 |
| 11314173 | Topographic phase control for overlay measurement | Vladimir Levinski, Yuri Paskover, Yoni Shalibo | 2022-04-26 |
| 11313669 | Systems and methods for optimizing focus for imaging-based overlay metrology | Andrew V. Hill | 2022-04-26 |
| 11300524 | Pupil-plane beam scanning for metrology | Andrew V. Hill, Avi Abramov, Asaf Granot, Andrei V. Shchegrov | 2022-04-12 |
| 11300405 | Grey-mode scanning scatterometry overlay metrology | Andrew V. Hill | 2022-04-12 |
| 11281111 | Off-axis illumination overlay measurement using two-diffracted orders imaging | Yoni Shalibo, Yuri Paskover, Vladimir Levinski, Shlomo Eisenbach, Gilad Laredo +1 more | 2022-03-22 |
| 11281112 | Method of measuring misregistration in the manufacture of topographic semiconductor device wafers | Daria Negri, Gilad Laredo | 2022-03-22 |