Issued Patents 2021
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923401 | Gate cut critical dimension shrink and active gate defect healing using selective deposition | Andrew M. Greene, Marc A. Bergendahl, Alex Joseph Varghese, Yann Mignot, Matthew T. Shoudy +2 more | 2021-02-16 |
| 10901317 | Extreme ultraviolet (EUV) lithography patterning methods utilizing EUV resist hardening | Benjamin D. Briggs, Michael Rizzolo, Chih-Chao Yang, Lawrence A. Clevenger | 2021-01-26 |
| 10903111 | Semiconductor device with linerless contacts | Alex Joseph Varghese, Marc A. Bergendahl, Andrew M. Greene, Dallas Lea, Matthew T. Shoudy +2 more | 2021-01-26 |
| 10892193 | Controlling active fin height of FinFET device | Yi Song, Veeraraghavan S. Baskar, Jay William Strane | 2021-01-12 |
| 10886462 | Encapsulated memory pillars | Ashim Dutta, Jennifer Church, Luciana Meli Thompson | 2021-01-05 |
| 10886169 | Airgap formation in BEOL interconnect structure using sidewall image transfer | Kangguo Cheng, Juntao Li, Yi Song, Peng Xu | 2021-01-05 |