Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164772 | Spacer-defined process for lithography-etch double patterning for interconnects | Nelson Felix, Ekmini Anuja De Silva, Yann Mignot | 2021-11-02 |
| 11062946 | Self-aligned contact on a semiconductor device | Ashim Dutta, Jennifer Church, Ekmini Anuja De Silva | 2021-07-13 |
| 10886462 | Encapsulated memory pillars | Ashim Dutta, Ekmini Anuja De Silva, Jennifer Church | 2021-01-05 |