Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10757248 | Identifying location of mobile phones in a vehicle | Xinlin Wang, Cheng Luo, Lan Cao, Cheng Cheng Dong | 2020-08-25 |
| 10679848 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Ishtak Karim, Frank L. Pasquale, Bart J. van Schravendijk | 2020-06-09 |
| 10665429 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Shankar Swaminathan, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2020-05-26 |
| 10651098 | Polishing with measurement prior to deposition of outer layer | Tomohiko Kitajima, Jeffrey Drue David, Taketo Sekine, Garlen C. Leung, Sidney P. Huey | 2020-05-12 |
| 10577691 | Single ALD cycle thickness control in multi-station substrate deposition systems | Romuald Nowak, Hu Kang, Adrien LaVoie | 2020-03-03 |
| 10566187 | Ultrathin atomic layer deposition film accuracy thickness control | Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2020-02-18 |
| 10559468 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more | 2020-02-11 |
| 10526700 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2020-01-07 |
| 10526701 | Multi-cycle ALD process for film uniformity and thickness profile modulation | Purushottam Kumar, Adrien LaVoie, Hu Kang, Tuan Nguyen, Ye Wang | 2020-01-07 |