Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832973 | Stress modulation of nFET and pFET fin structures | Huimei Zhou, Kangguo Cheng, Michael P. Belyansky, Oleg Gluschenkov, James J. Kelly +1 more | 2020-11-10 |
| 10734245 | Highly selective dry etch process for vertical FET STI recess | Zhenxing Bi, Muthumanickam Sankarapandian, Michael P. Belyansky | 2020-08-04 |
| 10672668 | Dual width finned semiconductor structure | Yi Song, Jay William Strane, Eric R. Miller, Fee Li Lie | 2020-06-02 |
| 10665512 | Stress modulation of nFET and pFET fin structures | Huimei Zhou, Kangguo Cheng, Michael P. Belyansky, Oleg Gluschenkov, James J. Kelly +1 more | 2020-05-26 |
| 10586733 | Multi-level air gap formation in dual-damascene structure | Jessica Dechene, Susan S. Fan, Son V. Nguyen, Jeffrey C. Shearer | 2020-03-10 |
| 10586700 | Protection of low temperature isolation fill | Michael P. Belyansky, Dechao Guo, Devendra K. Sadana, Jay William Strane | 2020-03-10 |
| 10535550 | Protection of low temperature isolation fill | Michael P. Belyansky, Dechao Guo, Devendra K. Sadana, Jay William Strane | 2020-01-14 |