Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698318 | Method and device for characterizing a mask for microlithography | Holger Seitz, Ute Buttgereit, Thomas Thaler, Thomas Frank, Markus Deguenther +2 more | 2020-06-30 |
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Christoph Husemann, Johannes Ruoff, Sascha Perlitz, Hans-Jurgen Mann | 2020-04-28 |
| 10606048 | Imaging optical unit for a metrology system for examining a lithography mask | Johannes Ruoff, Ralf Müller, Susanne Beder, Hans-Jurgen Mann, Jens Timo Neumann | 2020-03-31 |
| 10578881 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Thomas Frank, Dirk Doering, Holger Seitz, Mario Laengle | 2020-03-03 |