Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10719915 | Method and apparatus for determining a defocusing valve and for image-based determination of a dimensional size | Philipp Jester, Oliver Schwarz, Michael Totzeck, Matthias Barnert, Rainer Schmidt | 2020-07-21 |
| 10578881 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Thomas Frank, Holger Seitz, Mario Laengle, Ulrich Matejka | 2020-03-03 |