Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D906240 | Powercore module | Stefan Weiss, Patrick Sturm, Thomas Ziegler, Marco Lederer, Thomas Hunka +1 more | 2020-12-29 |
| 10698318 | Method and device for characterizing a mask for microlithography | Holger Seitz, Ute Buttgereit, Thomas Thaler, Ulrich Matejka, Markus Deguenther +2 more | 2020-06-30 |
| 10676271 | Anti-evaporation cap cover for towelette dispenser container and assembly | — | 2020-06-09 |
| 10578881 | Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit | Dirk Doering, Holger Seitz, Mario Laengle, Ulrich Matejka | 2020-03-03 |