Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698318 | Method and device for characterizing a mask for microlithography | Holger Seitz, Ute Buttgereit, Thomas Thaler, Thomas Frank, Ulrich Matejka +2 more | 2020-06-30 |
| 10599041 | Facet mirror | Stig Bieling, Johannes Wangler | 2020-03-24 |
| 10539883 | Illumination system of a microlithographic projection device and method for operating such a system | Vladimir Davydenko, Dirk Juergens, Thomas Korb | 2020-01-21 |