Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10606048 | Imaging optical unit for a metrology system for examining a lithography mask | Johannes Ruoff, Ralf Müller, Ulrich Matejka, Hans-Jurgen Mann, Jens Timo Neumann | 2020-03-31 |