Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Sascha Perlitz, Hans-Jurgen Mann | 2020-04-28 |
| 10606048 | Imaging optical unit for a metrology system for examining a lithography mask | Ralf Müller, Susanne Beder, Ulrich Matejka, Hans-Jurgen Mann, Jens Timo Neumann | 2020-03-31 |
| 10591825 | Projection lens, projection exposure apparatus and projection exposure method for EUV microlithography | Stephan Andre, Daniel Golde, Toralf Gruner, Norbert Wabra, Ricarda Schoemer +1 more | 2020-03-17 |