Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Johannes Ruoff, Hans-Jurgen Mann | 2020-04-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Christoph Husemann, Johannes Ruoff, Hans-Jurgen Mann | 2020-04-28 |