Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788748 | Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out | Thomas Thaler, Holger Seitz, Ute Buttgereit, Thomas Trautzsch, Mame Kouna Top-Diallo | 2020-09-29 |
| 10670387 | Determining the position of an object in the beam path of an optical device | Lars Stoppe, Markus Sticker | 2020-06-02 |
| 10634886 | Method for three-dimensionally measuring a 3D aerial image of a lithography mask | Ulrich Matejka, Johannes Ruoff, Sascha Perlitz, Hans-Jurgen Mann | 2020-04-28 |
| 10620417 | Method for generating a reflection-reduced contrast image and corresponding device | Lars Stoppe, Thomas MILDE, Johannes Winterot | 2020-04-14 |
| 10605654 | Method and device for beam analysis | Matthias Manger, Matus Kalisky, Lars Stoppe | 2020-03-31 |