Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788748 | Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out | Thomas Thaler, Holger Seitz, Ute Buttgereit, Mame Kouna Top-Diallo, Christoph Husemann | 2020-09-29 |
| 10539865 | Method and device for determining an OPC model | Holger Seitz, Thomas Thaler, Ute Buttgereit | 2020-01-21 |