Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788748 | Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out | Thomas Thaler, Holger Seitz, Ute Buttgereit, Thomas Trautzsch, Christoph Husemann | 2020-09-29 |